Plasmatherm SLR Upgrade Example
Plasmatherm 520/520 RIE Automation Example
ISE6000 Upgrade Example
Vactronic Automation Example
Live Charting module can show recipe parameters and actual parameters live while the recipe is running. It also works to display past runs logged in both ascii files and database files.
Power unit updated with new relais, fuses and power supplies.
New control hardware, located inside the tool.